Wafer Handling Platform
The Logosol wafer handling platform encompasses a variety of products and services derived from more than 30 years experience with semiconductor automation. The technology ranges from hardware, software and mechanical design to manufacturing, integration and application engineering. The company’s design related to wafer handling robots and prealigners addresses applications requiring drop-in replacement of legacy products in the semiconductor fabs as well as automated material handling in newly developed capital equipment by OEM manufacturers. These product lines employ technologies fully owned and controlled by Logosol including motion control electronics, wafer handling firmware, software tools, utilities and mechanical design. The availability of the entire technology spectrum allows extremely high level of seamless integration, manufacturability, reliability and cost-effectiveness.
Robot Licensing
Logosol has a long history of licensing its proprietary technology for wafer handling automation to various entities. The products include a wide range of robot sizes and arm configurations as part of a flexible modular automation platform. The licensees gain from the company’s extensive expertise in semiconductor automation, proven products and solutions, and 30+ years of expertise in the field. Our company provides a comprehensive and highly customizable unified technology that covers every aspect of your project, from mechanical design to motion control electronics, firmware, software tools, and utilities. Whether you need a simple or complex solution, we can customize our technology to meet your specific requirements. You will have complete control over your project without relying on third-party additions. Our technology is designed to be flexible, scalable, and dependable, ensuring high performance and quality standards. The company provides not only manufacturing licenses and documentation but also delivers the robot controllers, power supplies, and specific electronic modules required to build the entire product. Moreover, Logosol offers the most comprehensive range of wafer prealigners that integrate seamlessly with all licensed wafer handling robots.
Robot Controllers
LRC-x31g3 are three, four and five axis robot controllers with integrated CPU boards and power amplifiers designed for applications requiring precise control of rotary or linear brushless motors. They can be used as build-in or external controllers. LRC-x31g3 are controlled via host RS-232 or 10/100 Base-T Ethernet interfaces. Additional external devices can be seamlessly connected using Logosol Distributed Control Network extension interface. LRC-x31g3 are equipped with various safety features such as output and motor short protection, under voltage shutdown and encoder presence control, smart-stop functionality to avoid robot arm drops when the machine is stopped externally, or the power is disconnected. Advanced motion control technology supporting very high-resolution encoders enables superior multi-axis trajectory generation. Hardware-assisted position latching enhances the precision when used for on-the-fly wafer aligning.
Motion Control Framework
MCL5 is the fifth generation of Logosol’s proprietary motion control software package that provides a domain specific programming language and a multi-tasking, real-time interpreter. This is a programming framework dedicated to the design of robotics control applications. The MCL5 executable includes integration of motion controllers and I/O modules, implementation of various robot kinematics, support for complex trajectory motions, as well as monitoring of the system integrity. The executable also includes a real-time multi-tasking script interpreter. It allows the design of application specific scripts that can be used to coordinate the sequencing of robot motions and implement custom host communication protocols. The scripting language is defined by a set of reserved words and has expression syntax similar to the one in the C programming language.
For further information about wafer handling products and applications, please contact us or our authorized integrators to learn more how Logosol’s wafer handling platform can benefit your automation project.
iselRobotik Wafer Handling Robots
Co-designed and Powered by Logosol
isel Germany GmbH
Bürgermeister-Ebert-Straße 40
36124 Eichenzell
Germany
Phone: +49 6659 981-700
Website: www.iselrobotik.com
Diamond Wafer Handling Robots
Licensed and Powered by Logosol
Milara, Inc.
49 Maple St.
Milford, MA 01757
USA
Phone: +1 (877) 572-0006
Website: www.milarasmt.com